• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    Sealing device for a rotating passage with vacuum seal intended to receive a rotating mechanical element (3), the outer side of which can be applied to another mechanical element (1), comprising at least two sealing elements (7,8 ) arranged one behind the other in the axial direction of the rotating mechanical element (3) and the inner sides of which are designed to form an active sealing connection with the rotating mechanical element (3), or between two Sealing elements (7,8) are arranged at least two gas suction channels (12) to produce a vacuum, in particular an intermediate vacuum, a first internal sealing element (7) comprising a hollow chamber or a lip of 'seal (9) oriented towards the atmospheric side and capable of being subjected to an additional force acting radially, so that the pressure force of contact with the first internal sealing element (7) which acts on the rotating mechanical element (3 ), can be adjusted relative to the pressure force of contact with a second sealing element (8), ...
    公开号:BE1019119A5
    申请号:E2009/0802
    申请日:2009-12-21
    公开日:2012-03-06
    发明作者:Hans-Juergen Heinrich；Ulf Seyfert；Peter Botzler
    申请人:Ardenne Anlagentech Gmbh；
    IPC主号:
    专利说明:

    The invention relates to a sealing device for a rotary passage as used, for example, in vacuum coating installations for coating substrates.
    Rotary passages are required to pass rotating parts, such as for example shafts, through housing walls and the like, when the mechanical element driving, for example a driving device, is arranged on one side of the housing. housing wall and that the mechanical element to be driven, for example a rotating target, is disposed on the other side of the housing wall.
    When between the two sides of the housing wall a pressure difference must be maintained (eg atmospheric pressure on one side, very high vacuum on the other side) and / or the atmospheres on both sides of the wall of housing are of different composition (for example air on one side and inert gas on the other side), it is then necessary to make the rotating passage so as to prevent unintentional pressure compensation or gas exchange between them. two sides of the housing wall that are caused by leaks from the rotating passage.
    For example, rotating passages for vacuum coating installations may have two packings, one packer being arranged to make the passageway sealed with respect to the atmosphere and the other packer being arranged to make it tight with respect to the vacuum or the coating atmosphere. Between these two seals, it is possible to achieve a total separation of the fluids for example with a stop fluid, that is to say a stopping gas or a stop liquid. Alternatively, it is possible to achieve separation of the atmosphere and the coating space with an intermediate vacuum generated between the two packings.
    It is known that in case of strong AC current through the shaft, all the electrically conductive components that surround the shaft annularly can be heated by self-induction up to the destruction. This has the consequence that, when selecting seals, springs or bearing rings that surround the shaft, it must be ensured that they are made of non-conductive material or are interrupted at the peripheral level.
    It is also known that the sealing materials to be used must have good slip properties in dry operation. This requirement can be satisfied for example with PTFE material comprising fractions of graphite, molybdenum disulfide or bronze. The surface of the shaft may be coated, for example, with chromium oxide, which may optionally be sealed with phenolic resin and thus acquires a very high resistance to wear.
    Some oxygen-pumping vacuum coating processes, however, require a seal that is free from stopping fluid and can not be oxidizing materials. For these use cases, the PTFE packing material with polyoxybenzoyl ester moieties, combined with a chromium oxide antagonist bearing surface sealed with phenolic resin has been proven. In this case, the seal runs without lubrication on the chromium oxide layer.
    To achieve a sufficient sealing effect, the sealing elements of the sealing device may be provided for example with a sealing lip. Such sealing lips may be produced, for example, because an annular washer whose internal diameter is smaller than the outside diameter of the rotating mechanical member which protrudes through the rotating passageway is used as an element. sealing. In this case, a self-stressed sealing gap is produced between the sealing lip and the rotating mechanical element.
    The atmospheric pressure present and the intermediate vacuum present further produce a pressure load on the sealing lip. The different pressure loads on the two sealing lips cause different wear in the direction of the sliding surface. However, wear is critical for the life of the complete sealing device.
    When selecting sealing materials for the sealing lips, the following properties are taken into account: good return to initial state, minimal wear and good sliding properties. The fact that all the properties influence each other poses a problem when choosing sealing materials.
    The combinations of seals presented have the disadvantage that the sealing lip disposed closer to the vacuum generates, due to the smaller contact pressure forces, a lower sealing effect and that the sealing lip arranged closer to the atmosphere is experiencing greater wear and tear.
    An object is therefore to provide a combination of packings which at the same time has good sliding properties and minimal wear and achieves a long service life of the rotary passage. The wear of both seals must be compensated and the sealing effect of the seals combination must be increased.
    To do this, it is first proposed that for the seals or sealing elements contained therein, materials which have good slip properties and minimal wear are selected. It is furthermore proposed to influence the ratio of the contact pressure forces which are exerted by the sealing elements on the rotating mechanical element, in that it is intended to apply an additional force at least on a sealing element. The additional force may be constant, for example in the sense that a spring element which surrounds the sealing element may be used and is made of a non-conductive material with elastic properties, for example a polymer. In this case, it may be, for example, an O-ring or a special ring with a rectangular cross section, the diameter being chosen so that the ring in the mounted state is prestressed and produced in this way a constant additional force acting radially on the sealing element (Fig. 1, 2, 3). It is possible to adjust the additional force produced by a corresponding dimensioning of the ring.
    The spring element may consist of an annular metal spring which is interrupted without contact at at least one location.
    An additional modifiable and thus also dynamically adjustable force can be generated when a void space surrounding the sealing member is provided, which can be subjected to a selectable internal pressure. This can be formed by the sealing element itself, for example in that the sealing element is a flexible pipe surrounding the rotating mechanical element. The spring element may also be the additional flexible hose that surrounds the sealing element (Fig. 4). Finally, it can also be provided that the sealing element takes part in the formation of the spring element in cooperation with other elements, for example an additional ring also forming part of the sealing device, so that the sealing element acts as a membrane which generates on the rotating mechanical element an additional radial force depending on the internal pressure of the formed empty space (Fig. 5).
    The necessary prestressing of the sealing lips is obtained in the exemplary embodiments represented by means of the atmospheric pressure and in the region of the intermediate vacuum by means of the spring element. The spring element is dimensioned in such a way that, in sum, the same contact pressure force is generated on said one sealing element as the contact pressure force exerted by the atmospheric pressure on the other element of pressure. seal. Since the same forces are exerted on the two sealing elements, a maximum seal is obtained for identical wear.
    The invention will be explained in more detail below on the basis of exemplary embodiments and related drawings.
    Fig. 1 shows a first exemplary embodiment in which the additional force of a sealing member is generated by a spring element and the atmospheric pressure acting thereon,
    Fig. 2 shows a second embodiment in which the additional force of a sealing member is generated by a mechanically prestressed spring element. Fig. 3 shows a third embodiment in which the sealing elements are made in one piece.
    Fig. 4 shows a fourth embodiment in which the spring element is a flexible pipe further provided, surrounding the sealing element.
    Fig. 5 shows a fifth embodiment in which the sealing element forms a void space whose internal pressure communicating with the atmosphere generates the additional force.
    Fig. 6 shows a sixth exemplary embodiment in which the sealing element forms a void space whose internal pressure communicating with the atmosphere generates the additional force.
    The exemplary embodiments of FIGS. 1 to 4 each show a sealing device with two sealing elements 7 and 8 arranged one behind the other, with the sealing lips 9 turned upside down and with an intermediate suction arranged between the two sealing elements 7 and 8 for generating a preliminary or intermediate vacuum. The spring member 13 further provided influences the contact pressure force exerted on the shaft 3 by the inner sealing member 7 disposed closer to the vacuum.
    In FIG. 1, the sealing device comprises a plurality of construction elements arranged one behind the other in a bearing seat 1 and held in position by a flange 2, which have concentric openings for the passage of a shaft 3. These elements of construction comprise an inner delimiting ring 4, a median delimiting ring 5 and an outer delimiting ring 6, the inner delimiting ring 4 being disposed on the empty side and the outer delimiting ring 6 on the atmosphere side, as well as an element internal sealing element 7 disposed between the inner delimiting ring 4 and the middle delimiting ring 5 and an outer sealing element 8 disposed between the median delimiting ring 5 and the outer delimiting ring 6.
    The inner sealing element 7 and the outer sealing element 8 are respectively formed as flat annular washers whose internal diameter is smaller than the outside diameter of the shaft 3, so that the inner edge of the ring washer is returned and a sealing lip 9 adjacent to the shaft 3 is formed.
    The delimitation rings 4, 5 and 6 present in appropriate places grooves in which are placed O-rings 10 which serve to seal the delimitation rings 4, 5 and 6 relative to each other or with respect to the elements. 7 and 8 as well as with respect to the bearing seat 1.
    The median delimitation ring 5 has two bores which, on the one hand, open between the inner sealing element 7 and the outer sealing element 8 and which, on the other hand, are connected to channels which are provided in the bearing seat 1. This is in this case a gas inlet channel 11 and a gas suction channel 12. The suction channel 12 serves to generate between the element of internal sealing 7 and the outer sealing element 8 a preliminary or intermediate vacuum. The gas inlet channel 11, on the other hand, communicates with the atmosphere so that the atmospheric pressure prevails in the region of its mouth between the inner sealing element 7 and the outer sealing element 8.
    Between the mouth of the gas inlet channel 11 and the upside-down sealing lip 9 of the inner sealing element 7 are arranged a ring-shaped spring element 13 and a diaphragm ring 14. The ring The diaphragm has the function of sealing the gas inlet channel 11 with respect to the sealing lip 9, the sealing lip of the inner sealing element 7 which is in the region of the preliminary vacuum generated. by the gas suction channel, and at the same time to transmit the atmospheric pressure to the spring element 13.
    In this way, the atmospheric pressure is transmitted through the gas inlet channel through the diaphragm ring 14 and the spring member 13 to the sealing lip 9 of the inner sealing member 7, although that the pressure of the preliminary vacuum is exerted on the sealing lip 9 of the inner sealing element 7. As a result, the pressure on the sealing lip 9 of the inner sealing element 7 is also large than on the sealing lip 9 of the outer sealing element 8 which is exposed directly to atmospheric pressure.
    The exemplary embodiment shown in FIG. 2 differs from this embodiment in that there is no gas inlet channel 11. Instead, the spring element 13 is disposed between the middle boundary ring 5 and the lip sealing 9 of the inner sealing member 7 and, in fact, such that the spring element 13 is prestressed. This can be done by the appropriate choice of the inner diameter of the median delimitation ring 5, the outside diameter of the sealing lip 9 of the inner sealing element 7 as well as the thickness of the spring element. 13. In this case, the prestressing can be adjusted so that the preload of the spring element 13 generates an additional force on the sealing lip 9 of the inner sealing element 7 which corresponds to the radial force. generated by the atmospheric pressure acting on the sealing lip 9 of the outer sealing element 8.
    In the exemplary embodiment according to FIG. 3, the additional force on the sealing lip 9 of the inner sealing element 7 is generated in a manner analogous to that of the embodiment according to FIG. 2, namely by mechanical prestressing between the sealing lip 9 and a delimiting ring. In this case, however, it is the inner delimiting ring 4; a median delimitation ring is not planned. At the same time, in this embodiment, the inner delimitation ring 4 is the internal sealing element 7, that is to say the sealing element 7 is not made as a ring washer. separated, but is integrated in the inner delimiting ring 4. In the same way, the outer sealing element 8 with the sealing lip 9 is an integral part of the outer delimitation ring 6.
    Fig. 4 shows another embodiment in which a flexible pipe 15 is inserted into the gas inlet channel 11, which pipe surrounds the sealing lip 9 of the inner sealing element 7 inside the ring 5. Due to the pressure difference between the atmospheric pressure inside the flexible pipe 15 and the preliminary vacuum outside the flexible pipe 15, the flexible pipe 15 inflates and thus generates an additional radial force on the sealing lip 9 of the inner sealing element 7.
    In the exemplary embodiment according to FIG. 5, an auxiliary ring 16, which has a bore in communication with the gas inlet channel 11, is disposed between the inner boundary ring 4 and the middle boundary ring 5. This bore opens into the interior space of an inner U-shaped sealing element 7 in longitudinal section, so that the atmospheric pressure acts on the lower region of the U-shaped cross section and that an additional force is thus generated on this lower region generating the sealing effect with respect to the shaft 3.
    In the exemplary embodiment according to FIG. 5, the inner sealing member 7 disposed closer to the vacuum together with the auxiliary ring 16 confines a spring member with a void space, the auxiliary ring 16 confinement having a bore through which the void communicates with the gas inlet channel 11 and in this way with the atmosphere. A gas suction channel 12 is again disposed between the two sealing elements 7 and 8 to generate a preliminary or intermediate vacuum.
    A similar embodiment of a sealing device is shown in FIG. 6. Here, the inner delimiting ring 4 itself forms the inner sealing element 7; a middle bounding ring 5 is not required. The auxiliary ring 16 is incorporated in the inner delimiting ring 4, that is to say that the auxiliary ring 16 is surrounded by the inner delimiting ring 4. The sealing element disposed closer to the vacuum forms together with the auxiliary ring 16 confining a spring member with a void space, the auxiliary ring having a bore through which the void communicates with the gas inlet channel 11 and in this way with the atmosphere. The atmospheric pressure acts on the lower region of the inner sealing element 7 and thus generates an additional radial force on this lower region generating the sealing effect with respect to the shaft 3. A suction channel of gas 12 is again arranged between the two sealing elements 7 and 8 to generate a preliminary or intermediate vacuum and opens in the embodiment in the region of the outer sealing element 8 with the sealing lip 9 .
    List of part numbers 1 Bearing seat 2 Flange 3 Shaft 4 Inner ring 5 Center ring 6 Outer limit ring 7 Inner sealing element 8 Outer sealing element 9 Sealing lip 10 O-ring 11 Channel gas inlet 12 Gas suction pipe 13 Spring element 14 Diaphragm ring 15 Hose 16 Auxiliary ring
    权利要求:
    Claims (5)
    [1]
    Sealing device for a rotary passage with vacuum seal for receiving a rotating mechanical element (3) whose outer side can be applied to another mechanical element (1), comprising at least two sealing elements (7) 8) arranged one behind the other in the axial direction of the rotating mechanical element (3) and whose inner sides are designed to form an active sealing connection with the rotating mechanical element (3), where between two sealing elements (7, 8) are arranged at least two gas suction channels (12) to produce a vacuum, in particular an intermediate vacuum, a first internal sealing element (7) comprising a hollow chamber or a sealing lip (9) oriented towards the atmospheric side and being able to be subjected to an additional force acting radially, so that the contact pressure force with the first element sealing member (7) which acts on the rotating mechanical element (3), can be adjusted with respect to the contact pressure force with a second sealing element (8), which has a sealing lip (9) facing the atmospheric side and acting on the rotating mechanical element (3), and wherein a spring element (13) is provided to generate the additional force.
    [2]
    Sealing device according to claim 1, characterized in that the spring element (13) surrounds the first sealing element (7) and is made of a non-conductive material.
    [3]
    3. Sealing device according to claim 1 or 2, characterized in that the spring element (13) is a ring of polymeric material.
    [4]
    Sealing device according to Claim 2, characterized in that the first sealing element (7) itself forms the spring element (13) in that it has a void space which can be subjected to an internal pressure.
    [5]
    Sealing device according to Claim 2, characterized in that the first sealing element (7) contributes to the formation of a spring element (13) with a void space which can be subjected to an internal pressure.
    类似技术:
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    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    DE9014461U1|1990-10-18|1993-03-11|Siemens Ag, 8000 Muenchen, De|
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    WO2007124830A1|2006-04-28|2007-11-08|Andritz Ag|Sealing arrangement|
    DE2702809A1|1976-01-28|1977-08-04|M & J Dev Co|VALVE|
    FR2349771B1|1976-04-28|1981-10-30|Commissariat Energie Atomique|
    DE2811196C2|1978-03-15|1982-08-19|Howaldtswerke-Deutsche Werft Ag Hamburg Und Kiel, 2300 Kiel|Sealing for shafts|
    US4534569A|1983-09-27|1985-08-13|Mitsubishi Jukogyo Kabushiki Kaisha|Stern tube seal device providing a seal about a rotatable shaft|
    JPS60184794A|1984-03-02|1985-09-20|Doryokuro Kakunenryo|Remotely detachable joint|
    DE4017335C2|1990-05-30|1994-02-24|Blohm Voss Ag|Sealing device for rotating shafts, in particular stern tube sealing for screw shafts of ships|
    DE4105042C2|1991-02-19|1994-06-30|Blohm Voss Ag|Sealing arrangement for propeller shafts of ships|
    JP3106172B2|1991-02-26|2000-11-06|東京エレクトロン株式会社|Sealing structure of heat treatment equipment|
    DE4316672C1|1993-05-13|1994-07-28|Mannesmann Ag|Device for the production of metallic bodies by spraying|
    US5425543A|1993-09-17|1995-06-20|Buckshaw; Dennis J.|Seal assembly for rotating shaft|
    US5562406A|1995-01-11|1996-10-08|Ansimag Inc.|Seal assembly for fluid pumps and method for detecting leaks in fluid pumps or fluid containment devices|
    JP3905937B2|1996-06-26|2007-04-18|キーパー株式会社|Stern tube emergency seal device|
    US7855167B2|1998-02-02|2010-12-21|Odyssey Thera, Inc.|In vivo screening of protein-protein interactions with protein-fragment complementation assays|
    US6161834A|1997-08-01|2000-12-19|Imadco, Inc.|Pressure energized seal|
    JP2001066757A|2000-08-07|2001-03-16|Seiko Epson Corp|Exposure method|
    DE10065587B4|2000-12-28|2007-01-18|B&V Industrietechnik Gmbh|Sealing device for rotating shafts, in particular stern tube seal for ships|
    US7648177B2|2003-09-02|2010-01-19|Atomate Corporation|Apparatus and method for actuating or maintaining a seal by differential pressure|DE102010027757B4|2009-12-18|2015-12-10|Von Ardenne Gmbh|Feedthrough for a machine element|
    US20110254231A1|2010-04-19|2011-10-20|Isenberg Timothy J|Clean-In-Place Seal Assembly|
    US9739379B2|2011-04-20|2017-08-22|Dresser-Rand Company|High moisture environment seal assembly|
    DE102011077015A1|2011-06-06|2012-12-06|Elringklinger Ag|Radial shaft seal|
    FR2978699B1|2011-08-02|2014-02-28|Nexter Mechanics|ROTATING SEALING DEVICE AND SEALING RING FOR SUCH A DEVICE|
    FR2967228B1|2011-12-21|2013-03-29|Poclain Hydraulics Ind|DRAIN FOR DYNAMIC SEAL MOUNTING|
    EP2836747A1|2012-05-07|2015-02-18|Emigal Electronic Test Solutions Ltd.|Variable structure seals|
    DE102012110752A1|2012-11-09|2014-05-15|Krones Ag|Device and method for sealing a machine part relative to a second machine part|
    US20140284883A1|2013-03-22|2014-09-25|Saint-Gobain Performance Plastics Corporation|System, Method and Apparatus for Lip Seal Assembly|
    DE102013106788B4|2013-06-28|2019-07-11|VON ARDENNE Asset GmbH & Co. KG|Vacuum treatment plant with vacuum chamber feedthrough|
    US20150184751A1|2013-12-31|2015-07-02|Aktiebolaget Skf|Fluid seal assembly with extruded sealing member for leakage protection|
    DE202015100048U1|2015-01-08|2016-04-11|Krones Ag|seal|
    FR3033855B1|2015-03-18|2017-03-10|Skf Ab|BEARING, IN PARTICULAR FOR VEHICLE|
    WO2017023251A1|2015-07-31|2017-02-09|Trelleborg Sealing Solutions Us, Inc.|High pressure seal|
    法律状态:
    2018-02-08| MM| Lapsed because of non-payment of the annual fee|Effective date: 20161231 |
    优先权:
    申请号 | 申请日 | 专利标题
    DE102008064181|2008-12-22|
    DE102008064181|2008-12-22|
    DE102009014214|2009-03-25|
    DE200910014214|DE102009014214A1|2008-12-22|2009-03-25|Seal device for rotary feedthrough|
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